发明名称 ACCELEROMETER WITHOUT PROOF MASS
摘要 An accelerometer having a substrate with a cavity therein, a heater wire extending over the cavity, a pair of temperature sensor wires extending over said cavity equidistant from said heater, and means for passing electrical current through the heater so as to develop a symmetrical temperature gradient in the fluid extending outwardly from the heater to the two temperature sensors. The fluid may be a liquid or a gas surrounding the heater and temperature sensors. Applied acceleration disturbs this symmetry and produces a differential temperature between the two temperature sensors proportional to the acceleration.
申请公布号 WO9749998(A1) 申请公布日期 1997.12.31
申请号 WO1997CA00442 申请日期 1997.06.24
申请人 SIMON FRASER UNIVERSITY 发明人 LEUNG, ALBERT, M.
分类号 G01F1/684;G01P15/00;G01P15/08;G01P15/12;G01P15/18;G01P21/00;(IPC1-7):G01P15/00 主分类号 G01F1/684
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