发明名称 |
Double-poly monos flash EEPROM cell |
摘要 |
The present invention discloses a double poly metal oxide+544 nitride+544 oxide semiconductor electrically erasable programmable read only memory (EEPROM) for use in semiconductor memories. The EEPROM structure includes a select gate, an oxide+544 nitride+544 oxide layer, and a control gate. The control gate is formed on the oxide+544 nitride+544 oxide layer. A lightly doped drain (LDD) structure is formed adjacent to the drain and underneath the control gate.
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申请公布号 |
US5703388(A) |
申请公布日期 |
1997.12.30 |
申请号 |
US19960684517 |
申请日期 |
1996.07.19 |
申请人 |
MOSEL VITELIC INC. |
发明人 |
WANG, CHIH-HSIEN;CHEN, MIN-LIANG;CHANG, THOMAS |
分类号 |
H01L21/28;H01L21/336;H01L29/51;H01L29/792;(IPC1-7):H01L29/788;H01L29/76 |
主分类号 |
H01L21/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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