Moving magnet type multi-phase linear motor with vibration suppression and coil cooling means

摘要

A moving magnet type multi-phase linear motor which can suppress vibration of its own and can attain efficient cooling includes support members supporting two end portions of coils and arranged along the coil arrangement direction, pipes for supplying a coolant which are arranged in the support members, a stationary element fixed using a fixing member arranged at substantially the central portions of the coils to extend along the coil arrangement direction, and a movable element which has a substantially C-shaped section in a direction perpendicular to the coil arrangement direction.