发明名称 Quadrupole mass spectrometer
摘要 A quadrupole mass spectrometer includes means for measuring total ion current having an electron repeller cage disposed about an electron source filament. The electron repeller cage repels electrons emitted by the electron source filament, urging them away from both the repeller and the filament, while also attracting positive ions. When the positive ions contact the electron repeller cage, a current is induced that is measured at the electron repeller cage. The measured current represents total ion current transmitted through the spectrometer. Thus, the need to include a total pressure measurement plate to measure total ion current is eliminated, and since the ion-exposed surface area of the electron repeller cage is greater than the ion-exposed surface area of the total pressure measurement plate, the invention provides improved total pressure measurement sensitivity.
申请公布号 USRE35701(E) 申请公布日期 1997.12.30
申请号 US19960623942 申请日期 1996.03.29
申请人 MKS INSTRUMENTS, INC. 发明人 FOLEY, PAUL V.
分类号 G01N23/225;H01J49/10;H01J49/14;H01J49/42;(IPC1-7):H01J49/42 主分类号 G01N23/225
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