Silica glass member for UV-lithography, method for silica glass production, and method for silica glass member production

摘要

Recent UV-lithography is required to provide a fine and sharp pattern with a line width of 0.5 mu m or less. The present invention provides a silica glass member adapted for use as an optical element for UV-lithography, by giving consideration to the RMS value of wave front aberration and the slant element of refractive index, which have not been considered in the art. Also, there is provided a silica glass member excellent in durability to the ultraviolet irradiation, by introduction of hydrogen molecules at the synthesis of the silica glass, instead of the using a secondary treatment for hydrogen introduction.