| 发明名称 |
Carriage assembly and positioning device for a scanning probe |
| 摘要 |
<p>A carriage assembly and positioning device for a scanning probe are used for passing the scanning probe across a target surface. The carriage assembly is a unitary structure providing flat motion for the scanning probe during the scanning procedure, while further compensating for thermal creep. The positioning device comprises the carriage assembly along with piezo actuators and control systems to provide highly linear orthogonal motion. <IMAGE></p> |
| 申请公布号 |
EP0594362(B1) |
申请公布日期 |
1997.12.29 |
| 申请号 |
EP19930308209 |
申请日期 |
1993.10.14 |
| 申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
HAMMOND, JAMES MICHAEL;KLOS, MARTIN ALLEN;MARTIN, YVES;ROESSLER, KENNETH GILBERT;STOWELL, ROBERT MARSHALL |
| 分类号 |
G01B7/34;B23Q1/34;B23Q1/36;B23Q1/56;G01B5/00;G01N37/00;G01Q10/04;G01Q70/04;(IPC1-7):B23Q1/25;G01N27/00 |
主分类号 |
G01B7/34 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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