Method of measuring thickness and refractive indices of component layers of laminated structure and measuring apparatus for carrying out the same

摘要

A light beam emitted by a light source is projected through a collimator lens, a beam splitter and an objective on a sample having a laminated structure. The light beam reflected from the sample travels through the beam splitter to a detector and the detector provides a confocal signal. The detector provides an interference signal upon the reception of the reflected light beam and a reference light beam reflected by a reference mirror. The sample and the reference mirror are moved on the basis of the confocal signal and the interference signal, and the thickness and the refractive index of layer of the sample are determined on the basis of the respective displacements of the sample and the reference mirror.