APPARATUS FOR CORRECTING OF A VACUUM SENSOR

摘要

The apparatus for correcting vacuum sensors which are used in a vacuum equipment, comprises: a polygonal pillar chamber(1) having a cylindrical space in the interior thereof and a polygonal pillar shape in the exterior thereof; and standard sensors(5,6) and correcting sensors(7,8) each attached on a chamber side plate(2) of the polygonal pillar chamber(1) to be placed with the same partial pressure as each other, the standard sensors(5,6) and correcting sensors(7,8) each disposed to be in an equal shape, equal distance and equal position.