发明名称 |
Vibration cancellation apparatus |
摘要 |
<p>The object of the present invention is to provide a compact vibration cancellation apparatus based on a combination of air springs (11) and electromagnetic actuators (12) with smaller power capacity to enable the anti-vibration table (10) to be maintained in a level position even when the gravity of the anti-vibration table (10) moves over a large distance caused by a movement of the objective equipment (A) on the table. A vibration cancellation apparatus for isolating floor vibration or canceling vibration of the objective equipment (A) on a anti-vibration table (10) comprises: at least three displacement sensors (12), acceleration sensors (13), levitation position control means, vibration canceling control means, and air spring actuators (11) for supporting four corners of said anti-vibration table (10) by air pressure; wherein said air pressure in each of said air spring actuator (11) is controlled in response to a change of load weight which corresponds to a movement of gravity caused by movement of said objective equipment (A) on said anti-vibration table (10).</p> |
申请公布号 |
EP0814279(A2) |
申请公布日期 |
1997.12.29 |
申请号 |
EP19970110230 |
申请日期 |
1997.06.23 |
申请人 |
EBARA CORPORATION |
发明人 |
HAGA, TAKAHIDE;WATANABE, KATSUHIDE |
分类号 |
F16F15/027;F16F15/02;(IPC1-7):F16F15/027 |
主分类号 |
F16F15/027 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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