PLASMA TREATING APPARATUS AND OPERATING METHOD THEREOF,申请号KR19910003821-传众专利搜索

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发明名称	PLASMA TREATING APPARATUS AND OPERATING METHOD THEREOF
摘要
申请公布号	KR0125448(B1)	申请公布日期	1997.12.26
申请号	KR19910003821	申请日期	1991.03.11
申请人	FUJI DENKI KK.	发明人	OIWA, KIYOSI
分类号	H05H1/46;C23C16/50;C23C16/511;C23F4/00;H01J37/32;H01L21/205;H01L21/302;H01L21/3065;(IPC1-7):H01L21/302	主分类号	H05H1/46
代理机构		代理人
主权项
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