发明名称 |
GAS DELIVERY SYSTEMS FOR PARTICLE BEAM PROCESSING |
摘要 |
Apparatus and method of an improved gas delivery system for delivering reactant material to a workpiece, such as a substrate, being operated on by a particle beam employs a shroud-type concentrator having an interior axial passage. Fluid reactant material is supplied to the axial passage for delivery to the workpiece. A particle beam can traverse the axial passage for impingement on the workpiece surface, concurrently if desired with the reactant delivery.
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申请公布号 |
WO9749116(A1) |
申请公布日期 |
1997.12.24 |
申请号 |
WO1997US08978 |
申请日期 |
1997.05.28 |
申请人 |
MICRION CORPORATION |
发明人 |
CASELLA, ROBERT, A.;LIBBY, CHARLES, J.;RATHMELL, GARY, P. |
分类号 |
H01J37/30;H01J37/305;H01J37/317;H01L21/302;(IPC1-7):H01J37/30 |
主分类号 |
H01J37/30 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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