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发明名称
Plasma processing apparatus
摘要
申请公布号
GB9722408(D0)
申请公布日期
1997.12.24
申请号
GB19970022408
申请日期
1997.10.24
申请人
SURFACE TECHNOLOGY SYSTEMS LIMITED
发明人
分类号
H01J37/32;H01L21/302;H01L21/3065;H05H1/46
主分类号
H01J37/32
代理机构
代理人
主权项
地址
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