发明名称
摘要 PURPOSE:To obtain a highly sensitive photosensitive resin composition capable of being well preserved by incorporating N-phenylglycine, its derivative and their compds, into a polyamic ester. CONSTITUTION:A polyamic ester shown by formula I, N-phenylglycine shown by formula II, its derivative and the thiol compds. shown by formula III are used as the essential components. In formula I, R1,...R6 are 3 or 4-valent org. groups, etc., and can be the same or different, (l), (m) and (n) are 0 or 1, (p) is an integer of 1 to 5, 0<x, y<100, 0<z<80, x+y+z=100, and the (x), (y) and (x) are the percentage of each structural unit. Since N-phenylglycine, its derivative, and thiol compds. are incorporated into the polyamic ester, the photochemical radical reaction is easily and efficiently initiated and conducted, and the sensitivity is drastically improved. Besides, the viscosity change is reduced at room temp. by addition of thiol compds.
申请公布号 JP2693670(B2) 申请公布日期 1997.12.24
申请号 JP19910289589 申请日期 1991.11.06
申请人 发明人
分类号 G03F7/004;C08G73/10;C08K5/20;C08K5/22;C08L77/00;C08L77/06;C08L79/08;G03F7/028;G03F7/038;H01L21/027;H01L21/30;(IPC1-7):G03F7/038 主分类号 G03F7/004
代理机构 代理人
主权项
地址