发明名称 Integrated circuit wafer container
摘要 An improved container for storing large diameter semiconductor wafers. The container has a body member and an enclosure member that are secured together with complimentary threaded portions. The top of the enclosure member has a circular upstanding flange spaced from a circular upstanding protrusion. Upstanding radially ribs are provided between the flange and protrusion to strengthen the enclosure member and provide a means for engagement with a wrench that will apply a torque force.
申请公布号 US5699916(A) 申请公布日期 1997.12.23
申请号 US19970794600 申请日期 1997.02.03
申请人 TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD. 发明人 LIANG, WEN-SHENG
分类号 H01L21/673;(IPC1-7):B65D85/30 主分类号 H01L21/673
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