发明名称 |
Integrated circuit wafer container |
摘要 |
An improved container for storing large diameter semiconductor wafers. The container has a body member and an enclosure member that are secured together with complimentary threaded portions. The top of the enclosure member has a circular upstanding flange spaced from a circular upstanding protrusion. Upstanding radially ribs are provided between the flange and protrusion to strengthen the enclosure member and provide a means for engagement with a wrench that will apply a torque force.
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申请公布号 |
US5699916(A) |
申请公布日期 |
1997.12.23 |
申请号 |
US19970794600 |
申请日期 |
1997.02.03 |
申请人 |
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD. |
发明人 |
LIANG, WEN-SHENG |
分类号 |
H01L21/673;(IPC1-7):B65D85/30 |
主分类号 |
H01L21/673 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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