发明名称 |
Positive acid catalyzed resists having an alkali soluble resin with acid labile groups and inert blocking groups |
摘要 |
The invention comprises an acid hardened resist system consisting of a resin binder having acid labile blocking groups and inert blocking groups and a photoacid generator. The inclusion of inert blocking groups on the resin improves shelf life without deleteriously affecting photolithographic properties of the resist.
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申请公布号 |
US5700624(A) |
申请公布日期 |
1997.12.23 |
申请号 |
US19950438180 |
申请日期 |
1995.05.09 |
申请人 |
SHIPLEY COMPANY, L.L.C. |
发明人 |
THACKERAY, JAMES W.;SINTA, ROGER F.;DENISON, MARK D.;ABLAZA, SHERI L. |
分类号 |
G03F7/004;G03F7/039;(IPC1-7):G03F7/021;G03F7/023;G03C1/72 |
主分类号 |
G03F7/004 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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