发明名称 |
Method for producing a semiconducting material |
摘要 |
A method for producing a semiconducting material by subjecting a hydrosilane monomer to dehydrogenative condensation followed by thermal decomposition is disclosed. The hydrosilane monomer may be a hydromonosilane, a hydrodisilane or a hydrotrisilane. The dehydrogenative condensation is conducted in the presence of a catalyst that contains at least one metal or metal compound of Groups 3B, 4B and 8 of the Periodic Table. The catalyst may be used in conjunction with a silane compound or a metal hydride. The semiconducting material that is formed may have a silicon content of 70 atomic % or more.
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申请公布号 |
US5700400(A) |
申请公布日期 |
1997.12.23 |
申请号 |
US19950514580 |
申请日期 |
1995.08.14 |
申请人 |
NIPPON OIL CO., LTD. |
发明人 |
IKAI, KEIZO;MINAMI, MASAKI;MATSUNO, MITSUO |
分类号 |
C08G77/60;H01B1/04;H01L51/30;(IPC1-7):H01B1/04;H01B1/02;C23C16/24;C23C16/32 |
主分类号 |
C08G77/60 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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