| 摘要 |
PROBLEM TO BE SOLVED: To enhance the sensing accuracy. SOLUTION: A movable body 12 installed on a base board 11 is vibrated in the directions parallel with the base board 11, and the movable body displacement in the direction perpendicular to the base board 11 generated by Corioli's force resulting from input of an angular velocity is sensed in the form of a change in the electrostatic capacity by the movable body 12 and a sensor electrode 31 installed opposite the base board 11 about the movable body 12. According to this configuration, the dielectric capacity of the sensor electrode 31 and base board 11 can be lessened, compared with a conventional arrangement where a sensor electrode is installed on the surface of a board, and influence upon the sensing electrostatic capacity is accordingly lessened. |
