| 摘要 |
PROBLEM TO BE SOLVED: To limit the disturbance of an image on a display or the occurrence of moirιphenomenon in a sensor to a minimum by positioning, beforehand, a part of a semiconductor element or a electric wiring pattern in at least two locations in each array as an alignment mark in a reference line used as an arraying direction reference. SOLUTION: Four sensor panels 101 to 104 are respectively fixed on independently provided stages 131 to 134 with element sides placed upward and, while parts of patterns are detected for required observation areas 141' to 145' by using observing means 141 to 145 such as transmission type microscopes from the back surfaces of sensors, the stages are optionally moved in X, Y andθdirections respectively. Alignment is realized by positioning a pattern at outer peripheral part in a reference line provided in the visual field of the microscope. In this case, by simultaneously aligning at least two locations with X and Y directions components per one joining line, last optimal alignment state is formed.
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