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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH09330911(A)
申请公布日期
1997.12.22
申请号
JP19960149310
申请日期
1996.06.11
申请人
TOSHIBA CORP
发明人
NAKAMURA KAZUHIKO
分类号
C23F4/00;H01L21/027;H01L21/302;H01L21/3065;(IPC1-7):H01L21/306
主分类号
C23F4/00
代理机构
代理人
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