| 摘要 |
PROBLEM TO BE SOLVED: To provide a forming method of a graphite film which prevents resticking of the graphite film once separated from a glass panel. SOLUTION: In the first spray developing, first, pure water is sprayed for only about 12sec. to a glass panel 2 from a nozzle 5. Thereafter, by sequence control, a pump 22 is operated, a surfactant solution is sprayed to flow in the glass panel 2 as a rinse liquid from a nozzle 21 by about 500cc for about 5sec. Further, the glass panel 2 is moved to a position of the next spray developing by a carrier 1, again similar spray developing is performed. In this way, on a graphite film in an internal surface of the glass panel 2 and a fine piece of the separated graphite film, a surfactant is respectively applied to act, between the glass panel 2 and the graphite film formed in its surface and the fine piece separated therefrom, electrical repulsion force is accelerated, the fine piece of the graphite film can be prevented from resticking. |
