发明名称 |
OXIDE SUPERCONDUCTOR JOSEPHSON JUNCTION ELEMENT |
摘要 |
PROBLEM TO BE SOLVED: To provide an oxide superconductor Josephson junction element structure reducing a stress to a superconductor thin film due to lattice mismatching generating in an interface of a superconductor thin film/tunnel barrier insulator layer/superconductor thin film and further alleviating deterioration of superconducting characteristics by using a lattice matching tunnel barrier insulator layer. SOLUTION: An oxide superconductor thin film containing a composition represented by a first LnBa2 Cu3 Ox 2 (Ln: at least one type of elements of Y and lanthanide element) in which an a-axis is oriented to a board main surface and a c-axis is oriented in a film surface, an insulator thin film containing a composition represented by an Ln'2 Cu3 O4 3 (Ln': lanthanide element), and an oxide superconductor thin film containing a composition represented by a second LnBa2 Cu3 Ox 4 in which an a-axis is oriented to a substrate main surface and a c-axis is oriented in a film surface are sequentially stacked from a substrate side to form the oxide superconductor Josephson junction element.
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申请公布号 |
JPH09331084(A) |
申请公布日期 |
1997.12.22 |
申请号 |
JP19960145540 |
申请日期 |
1996.06.07 |
申请人 |
NIPPON TELEGR & TELEPH CORP <NTT> |
发明人 |
MUKODA MASASHI;MIYAZAWA SHINTARO |
分类号 |
H01L39/22;H01L39/24;(IPC1-7):H01L39/22 |
主分类号 |
H01L39/22 |
代理机构 |
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代理人 |
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