摘要 |
<p>PROBLEM TO BE SOLVED: To simultaneously remove particle-like contaminant and gaseous contaminant in exhaust gas by sandwiching at least one out of a porous filter composed of dielectric body and a dense dielectric body between a pair of electrodes. SOLUTION: An induction electrode 1a which is put into close contact with a dense dielectric body 2a made of ceramic such as alumina or glass such as quartz and is made of a plate, a net, or an deposited film of a conductive or semiconductive material and a discharge electrode 4a which is parallel to the induction electrode 1a are disposed. A plate-like porous filter 14a composed of dielectric material such as ceramic is disposed between the dielectric body 2a and the discharge electrode 4a to form discharge spaces 3a, 3b. Both electrodes 1a and 4a are held such that they are insulated from each other and an alternating current high voltage power source or a high voltage pulse power source 9 is connected between the electrodes 1a and 4a via lead wires 7, 8. Particle-like contaminant in the exhaust gas to be treated is filtered and removed by the porous filter 14a and gaseous contaminant is dissolved by discharge plasma into radical safe gas and is removed.</p> |