| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for exciting a gas laser by microwave discharge improving a laser output and an oscillation efficiency by uniformly exciting laser gas medium in a cavity resonator by discharge and a microwave gas laser. SOLUTION: This laser oscillator comprises a quartz plate 1 for introducing a microwave output from a magnetron 2 into a cavity resonator 4 to form a gas channel for discharging by its microwave field, and an optical resonator having a totally reflecting mirror 5 and an output mirror 6. In this case, a columnar quartz rod 12 of a dielectric is installed at an upstream side of a gas flow with respect to a laser optical axis in a gas channel formed in the resonator 4, thereby stably maintaining a discharge plasma generated by the microwave field. |
