| 摘要 |
PROBLEM TO BE SOLVED: To quickly and accurately execute fine adjustment for the rotational symmetry aberration of an optical system by changing the surface power of one surface of an aberration correcting optical system arranged in a telecentric optical path on the object side or image side of a J optical system. SOLUTION: The aberration correcting optical system 4 is arranged in a telecentric optical path between a lens surface most close to a projecting optical system 3 and an image surface. The aberration of the optical system is corrected by changing the surface power of one surface of the optical system 4. When it is defined that the synthetic power of a partial lens group in the optical system between an iris arranged in the optical system and the optical system 4 isϕ1 and the synthetic power of the optical system 4 isϕ2, a conditional relation|ϕ1/ϕ2|>80 is satisfied. Consequently rotational symmetry aberration to be finely adjusted can be corrected while suppressing the aberration not to be corrected.
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