发明名称 STRIPPING COMPOSITION
摘要 The invention relates to an agent for removing photoresist and to a method of removing photoresist. Said agent essentially comprises 20 to 50 wt.% of a primary alcoholamine and a solvent which contains 30 to 70 wt.% of an alkyleneglycolalkylether, as well as 70 to 30 wt.% of an organic sulphur-oxide compound, such as dimethylsulphoxide. It has been found that said agent can be used very effectively to strip away photoresist. Said effectiveness continues unabated even after a large number of substrates have been treated with this agent.
申请公布号 WO9748023(A1) 申请公布日期 1997.12.18
申请号 WO1997IB00599 申请日期 1997.05.27
申请人 PHILIPS ELECTRONICS N.V.;PHILIPS NORDEN AB 发明人 KUYKEN, MICHAEL, ALFRED, JOSEPHUS;JACOBS, JOHANNES, WILHELMUS, MARIA;SCHELL, HENRICUS, WILHELMUS, MARIA;JANSSEN, ANTONIUS, THEODOOR, JOZEF
分类号 G03F7/42;(IPC1-7):G03F7/42 主分类号 G03F7/42
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