| 摘要 |
<p>Microfabricated filters (100) utilizing a bulk substrate structure (101) and a thin film structure (103) and a method for constructing such filters (100). The pores (105) of the filters (100) are defined by spaces between the bulk substrate structure (101) and the thin film structure (103) and are of substantially uniform width, length and distribution. The width of the pores (105) is defined by the thickness of a sacrificial layer (not shown) and therefore may be smaller than the limit of resolution obtainable with photolithography. The filters (100) provide enhanced mechanical strength, chemical inertness, biological compatibility, and throughput. The filters (100) are constructed using relatively simple fabrication techniques.</p> |
