| 摘要 |
A substrate processing apparatus (22, 100, 200) comprising a substrate transport (24, 106, 202) and substrate processing chambers (26, 102). The substrate transport (24) has a transport chamber (32) and a transport mechanism (34, 106, 202). The transport mechanism has a rotatable drive (48, 112, 204), an arm (50, 208) pivotably connected to the drive to pivot in vertical directions, and a substrate holder (52, 210) pivotably connected to an end of the arm by an articulating wrist (64). The arm (50, 208) can vertically move the substrate holder (52, 210) up and down. The substrate processing chambers (26, 102) are stationarily connected to the transport chamber (32) at two different vertical levels.
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