发明名称 |
Method for controlling configuration of laser induced breakdown and ablation |
摘要 |
In one aspect the invention provides a method for laser induced breakdown of a material with a pulsed laser beam where the material is characterized by a relationship of fluence breakdown threshold (Fth) versus laser beam pulse width (T) that exhibits an abrupt, rapid, and distinct change or at least a clearly detectable and distinct change in slope at a predetermined laser pulse width value. The method comprises generating a beam of laser pulses in which each pulse has a pulse width equal to or less than the predetermined laser pulse width value. The beam is focused to a point at or beneath the surface of a material where laser induced breakdown is desired. The beam may be used in combination with a mask in the beam path. The beam or mask may be moved in the x, y, and Z directions to produce desired features. The technique can produce features smaller than the spot size and Rayleigh range due to enhanced damage threshold accuracy in the short pulse regime. |
申请公布号 |
AU684633(B2) |
申请公布日期 |
1997.12.18 |
申请号 |
AU19950022741 |
申请日期 |
1995.03.29 |
申请人 |
THE REGENTS OF THE UNIVERSITY OF MICHIGAN |
发明人 |
GERARD A MOUROU;DETAO DU;SUBRATA K DUTTA;VICTOR ELNER;RON KURTZ;PAUL LICHTER;XINBING LIU;PETER P PRONKO;JEFFREY A SQUIER |
分类号 |
A61B18/20;A61F9/008;B23K26/00;B23K26/06;B23K26/36;B23K26/38;B23K26/40;H01S3/00 |
主分类号 |
A61B18/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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