| 摘要 |
<p>PURPOSE:To provide a mirror surface finishing polishing method for a carbon substrate by which mass-processing becomes possible and the carbon board can be polished at a low cost with high efficiency by using an extremely lower- cost alumina abrasive grain than a diamond abrasive grain, and using a normally used double side polishing machine. CONSTITUTION:In a mirror surface finishing polishing method for a carbon substrate, mirror surface finishing polishing is carried out on the carbon substrate composed of a carbon material by using water, an alumina abrasive grain, and a polishing assistant. The alumina abrasive grain is obtained by dispersing a material selected from the group consisting of a pulverized alumina type abrasive grain having an average particle diameter of not more than 2mum, a hexagonal plate-like alumina type abrasive grain having an average particle diameter of not more than 5mum and a particulate alumina type abrasive grain having an average particle diameter of not more than 1mum by not more than 10weight% in polishing liquid composed of water and the polishing assistant. The polishing assistant is a water soluble inorganic substance constituting a bichromate group, a nitric acid group or a chlorine group and aluminum salt.</p> |
