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发明名称
摘要
申请公布号
JP2691594(B2)
申请公布日期
1997.12.17
申请号
JP19880303974
申请日期
1988.12.02
申请人
发明人
分类号
H01L21/22;H01L21/225;(IPC1-7):H01L21/225
主分类号
H01L21/22
代理机构
代理人
主权项
地址
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