Process for preparing superconducting thin film formed of oxide superconductor material

摘要

A process for preparing an oxide superconductor thin film which has a high crystalline, clean and excellent superconductive surface on a substrate by MBE. The MBE is effected under a condition that the substrate is heated and an oxidizing gas is locally supplied to the proximity of the substrate so that the pressure of the proximity of the substrate becomes 6 x 10<-><6> to 8 x 10<-><5> Torr at a background pressure.