Process for fabricating an optical device for generating a second harmonic optical beam

摘要

A method for fabricating an SHG device by forming an inversion region (4) having a first polarization selectively in a ferroelectric substrate (1) that has a second, opposite polarization. The method comprises the steps of: applying a proton exchange process for exchanging cations in the ferroelectric substrate with protons selectively in correspondence to a region in which the inversion region is to be formed; providing electrodes (5, 6) on upper and lower major surfaces of the ferroelectric substrate; and growing the inversion region selectively in a direction vertical to the upper major surface of the ferroelectric substrate while applying a d.c. voltage to the electrode on the upper major surface of the ferroelectric substrate to induce an electric field acting in a direction coincident to a direction of said first polarization in said ferroelectric substrate.