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发明名称
METAL WIRING STRUCTURE FOR SEMICONDUCTOR ELEMENT AND FORMATION THEREOF
摘要
申请公布号
JPH09326368(A)
申请公布日期
1997.12.16
申请号
JP19960352538
申请日期
1996.12.16
申请人
GENDAI DENSHI SANGYO KK
发明人
KOU SEIHO
分类号
H01L21/28;H01L21/768;(IPC1-7):H01L21/28
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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