| 摘要 |
PROBLEM TO BE SOLVED: To accurately measure a thickness of a film coated discontinuously, by setting mask data by a mask data-setting means and masking data which cannot be used as measurement data when a discontinuous part of the film is measured with a film thickness-measuring apparatus. SOLUTION: A thickness of a coating film 2 formed on an application base 1 and having a discontinuous part is measured via detecting heads 13, 15 by a thickness-measuring device 11 based on the amount of penetratingβand X rays generated at radiation generation sources 12, 14 and projected to the film 2. A measurement result is obtained. An unusable measured value appearing in the measurement result when the discontinuous part is measured is masked by a data-processing device 16. An average value of the measurement result measured by the measuring device 11 other than the masked data is obtained and output together with trend data and a stand value.
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