| 摘要 |
PROBLEM TO BE SOLVED: To improve detection sensitivity and stability of the detection sensitivity. SOLUTION: A vibrating body 12 arranged on a substrate 11 is vibrated in a direction parallel to the substrate 11. The shift of the vibrating body 12 due to inputting of an angular velocity in a perpendicular direction to the substrate 11 is detected, thereby to detect the input angler velocity in the vibration type angular velocity sensor. A recovery means is provided in the sensor which can shift the vibrating body 12 in the perpendicular direction. The recovery means is composed of the vibrating body 12 and a recovery electrode 31, using a static electricity between the vibrating body 12 and recovery electrode 31. The shift of the vibrating body 12 die to inputting of an acceleration is prevented by the static electricity. |
