| 摘要 |
PROBLEM TO BE SOLVED: To improve the characteristic balance such as the pattern shape, sensitivity, resolution, developing property and focus tolerance by using a copolymer containing specific repeated units, having a specific light transmission factor, and containing an alkali-soluble resin and a radiation-sensitive acied generating agent. SOLUTION: This copolymer contains a cyclic unit expressed by the formula I and a cyclic unit expressed by a formula II, it has the light transmission factor of 50% or above for the film thickness of 1μm at the wavelength of 248nm, and it contains an alkali-soluble resin and a radiation-sensitive acid generating agent. In the formulas, R<1> and R<2> represent hydrogen atom or methyl group, R<3> represents hydrogen atom, chain alkyl group having 1-10 carbon atoms, cyclic alkyl group having 3-10 carbon atoms, aryl group having 6-10 carbon atoms, or aralkyl group having 7-11 carbon atoms, and R<4> and R<5> independently represent chain alkyl group having 1-10 carbon atoms, halogenated chain alkyl group having 1-10 carbon atoms, or cyclic alkyl group having 3-10 carbon atoms. |
