POLISHING METHOD OF THIN PLATE

摘要

PROBLEM TO BE SOLVED: To separate thin plates in atmospheric air after polishing by accumulating a plurality of thin plates, fixing between the thin plates by ice, and polishing outer periphery of the thin plates. SOLUTION: A proper amount of water is supplied to an accumulated body 2 from a water discharge part 7 and a proper amount of liquid nitrogen is supplied to the accumulated body 2 from a supply port 6a of a liquid nitrogen supply tank 6 immediately before outer periphery of the accumulated body 2 is polished, and ceramic discs of the accumulated body 2 adhere by freezing the water. It is desirable that the supply port 6a of liquid nitrogen comes close to the accumulated body 2 as much as possible. Outer periphery of the accumulated body 2 is polished while the ceramic discs of the accumulated body 2 adhere by ice. It is unnecessary that the whole face of the ceramic disc adheres, and it is enough that the ceramic disc adheres to such extent that the accumulated body 2 is not separated.