| 摘要 |
PROBLEM TO BE SOLVED: To provide a thin film forming device by which a substrate maintains flatness even if temp. rises in forming film thereon in the case a magnetic thin sheet is used as the substrate, and furthermore, the distribution of the thickness of the thin film to be formed is small. SOLUTION: A magnetic substrate 16 is fixed into a tray 7, is applied with a liner 18 and is fixed by an buckle 19, and furthermore, on the back side of the liner 18, four square bar-shaped permanent magnets 15 are flatly arranged and fixed. The line B of magnetic force passes through the magnetic substrate 16 from the N pole of the permanent magnet 15 reaches the S pole of the adjacent permanent magnet 15, and in the middle of both permanent magnets 15, the magnetomotive force of the permanent magnets 15 is regulated so as to suppress the magnetic flux density in the place of the height of 5mm from the surface of the magnetic substrate 16 to <=150 gauss, preferably, to <=100 gauss. |
