METHOD AND DEVICE FOR CRYSTALLOGRAPHIC AXIS ORIENTATION ADJUSTMENT OF INGOT USING X RAY

摘要

PROBLEM TO BE SOLVED: To provide the method and device which can adjust the crystallographic axis orientation of the ingot on the same machine as an X-ray crystallographic axis orientation measuring instrument by making good use of X rays. SOLUTION: A slide table 22 is provided on the same machine as the X-ray crystallographic axis orientation measuring instrument 20, and the ingot 12 with a tilt unit 16 is fixed to the slide table 22. The slide table 22 is moved to put the ingot 12 close to an X-ray irradiation part 26 and an X-ray photodetection part 28. The X-ray irradiation part 26 and X-ray photodetection part 28 are driven to set the crystallographic orientation of the ingot 12 vertically and after the X-ray irradiation part 26 and X-ray photodetection part 26 are shifted to horizontal positions, the vertical crystallographic orientation is measured by the X-ray irradiation part 26 and X-ray photodetection part 28. Then the ingot 12 is tilted in the direction of the measured crystallographic orientation by the tilt unit 16.