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发明名称
NEGATIVE RADIATION-SENSITIVE RESIN COMPOSITION
摘要
申请公布号
JPH09325492(A)
申请公布日期
1997.12.16
申请号
JP19960143186
申请日期
1996.06.05
申请人
JAPAN SYNTHETIC RUBBER CO LTD
发明人
IWANAGA SHINICHIRO;IKEZAKI HIROTSUGU;OTA YOSHIHISA;TANABE TAKAYOSHI
分类号
G03F7/004;G03F7/038;H01L21/027;(IPC1-7):G03F7/038
主分类号
G03F7/004
代理机构
代理人
主权项
地址
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