| 摘要 |
PROBLEM TO BE SOLVED: To obtain a focus detector introducing the principle of a confocal microscope. SOLUTION: Light emitted from focus detecting light sources 11, 12 and 13 are reflected by a dichroic mirror 15 arranged in an observation optical path running from an objective lens 1 to an eyepiece 2, then, the light is guided into the observation optical path and an observation sample 5 is irradiated with the light transmitted through the objective lens 1. And the light returning through the objective lens 1 after being reflected by the observation sample 5 is reflected by the dichroic mirror 15 and a half mirror 16 so as to irradiate the pin hole 17a of a photodetecting substrate 17, then, the quantity of light transmitted through the pin hole 17a is detected by a light quantity detector 18. Besides, the focus detector is provided with a focusing device 6 for shifting the sample 5 in up and down directions. The focus detecting light sources and the photodetecting substrate 17 are arranged on the common position of the image plane of the sample 5 by the objective lens 1, then, a just focused state is obtained when the light quantity detected by the light quantity detector 18 comes to the maximum by changing a distance by the focusing device 6. |
