Heat-resistant electrode material, electrode using the same, and apparatus having plasma generating unit using this electrode

摘要

A heat-resistive electrode material substantially consisting of 40 to 60 wt % of at least one of ZrB2 and TiB2, 20 to 50 wt % of BN, and not more than 30 wt % of AlN is disclosed. This heat-resistive electrode material is used in at least portions of electrodes of an apparatus having a plasma generating unit, e.g., an ion source, a plasma etching apparatus, or a plasma CVD apparatus, that contacts a plasma.