发明名称 |
Unibody gas plasma source technology |
摘要 |
A unibody, monolithic, one-piece PBN plasma chamber for an MBE gas plasma source. The chamber has a cylindrical configuration with at least one effusion orifice and a gas inlet opening. The gas inlet opening is preferably communicatively connected to an elongated, tubular inlet member. The inlet member is preferably coupled to a liquid cooled gas source by an intermediary connection member which is preferably constructed of a refxactory metal. The chamber minimizes leakage and maximizes efficiency. A gas plasma source assembly and a method for making the chamber are also disclosed.
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申请公布号 |
US5698168(A) |
申请公布日期 |
1997.12.16 |
申请号 |
US19950551560 |
申请日期 |
1995.11.01 |
申请人 |
CHORUS CORPORATION |
发明人 |
PRIDDY, SCOTT W.;CHENG, HWA |
分类号 |
C23C14/00;C30B23/06;H05H1/24;(IPC1-7):B01J19/08 |
主分类号 |
C23C14/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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