发明名称 |
Method of fabricating composite piezo-electric members and a mask used for the fabrication of the same |
摘要 |
Composite piezo-electric members having an intended structure are fabricated based on the LIGA process which includes the exposure of synchrotron radiation X-rays, development and lithography. With the intention of reducing the cost of the X-ray exposure mask, it is made of wire gauze having a regular pattern and formed by electrocasting. <IMAGE> |
申请公布号 |
EP0813255(A1) |
申请公布日期 |
1997.12.17 |
申请号 |
EP19970304004 |
申请日期 |
1997.06.10 |
申请人 |
GE YOKOGAWA MEDICAL SYSTEMS, LTD. |
发明人 |
TAKEUCHI, YASUHITO |
分类号 |
H01L21/027;B06B1/06;B81C1/00;G03F1/22;G03F7/20;H01L41/22 |
主分类号 |
H01L21/027 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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