发明名称 Apparatus for measuring motion errors of five degrees of freedom along guideway
摘要 A computer aided error measurement system is disclosed. The horizontal and vertical straightness errors as well as roll, pitch and yaw errors are measured simultaneously with just one setup according to the system. The system includes a computer and related components thereof. The system also includes a light source, two beam splitters, and three photodetectors. The output signals are inputted into the computer via amplifying circuits and an analog to digital converter. The computer actuates a motor driver to drive a stepping motor and controls a feed axis with the motion errors. The whole measurement takes are performed in very short time and in real time.
申请公布号 US5698843(A) 申请公布日期 1997.12.16
申请号 US19950527678 申请日期 1995.09.12
申请人 PHAK, HEE JAE 发明人 PHAK, HEE JAE
分类号 G01B11/00;G01B11/03;(IPC1-7):H01J40/14 主分类号 G01B11/00
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