发明名称 |
Process for producing ceramic microstructures from polymeric precursors |
摘要 |
A process for producing a ceramic having a microstructured surface with a surface profile depth of less than 1 micron, measured by the atomic force microscopy, comprising preparing a polymeric precursor material, shaping the precursor material into a structured mold insert of an inherently stable mold insert material having a structured surface geometry corresponding with the microstructured surface of the ceramic to form a shaped precursor material, the shaped precursor material being rendered infusible by chemical crosslinking, and wherein the inherently stable mold insert material is selected from materials having sufficient strength for structuring and high molding accuracy, and pyrolyzing the shaped precursor material, whereby the ceramic having the microstructured surface is obtained.
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申请公布号 |
US5698485(A) |
申请公布日期 |
1997.12.16 |
申请号 |
US19960589414 |
申请日期 |
1996.01.22 |
申请人 |
HOECHST AKTIENGESELLSCHAFT;INSTITUT FUER MIKROTECHNIK GMBH |
发明人 |
BRUECK, MARTIN;VAAHS, TILO;BOECKER, WOLFGANG;EHRFELD, WOLFGANG;LACHER, MANFRED;GIEBEL, LUDWIG |
分类号 |
C04B35/571;B28B1/30;C04B35/00;C04B35/589;C04B35/622;(IPC1-7):C04B35/64 |
主分类号 |
C04B35/571 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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