发明名称 WIRE BONDING EQUIPMENT
摘要 PROBLEM TO BE SOLVED: To increase transmission efficiency of ultrasonic vibration when a capillary is exchanged, obtain excellent reproducibility and improve the life of an attaching part of an ultrasonic horn. SOLUTION: A plurality of metal bushes 2 which are circularly protruded are uniformly arranged on a peripheral wall of a fixing hole 1 of a horn 3 in which a capillary 4 is inserted and fixed. The capillary 4 is clamped and retained with the horn 3 via the metal bushes 2. Even if the capillary 4 has unevenness on the surface and irregularity in the outer dimension, a large number of point contacts or line contacts with an ultrasonic horn can be obtained in response to the irregularity of dimension or the unevenness of the capillary 4.
申请公布号 JPH09321078(A) 申请公布日期 1997.12.12
申请号 JP19960136705 申请日期 1996.05.30
申请人 NEC YAMAGATA LTD 发明人 OTSUBO AKIHIDE
分类号 H04R1/30;H01L21/60;H01L21/607 主分类号 H04R1/30
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