| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a small contact sensor wherein contact state is detected always with high accuracy. SOLUTION: A pair of piezoelectric elements 2 and 3 are provided on a vibrator 1 as a body, and one piezoelectric elements 2 is applied with a voltage of specified frequency for the vibrator 1 to be vibrated, and a detecting means 8 for a voltage-motive force occurring at the other piezoelectric elements 3 due to the vibration is provided. When a sample contacts to the vibrator 1 and the vibration of the vibrator 1 is limited, the contact state of the sample is detected with the detecting means 8.</p> |
