| 摘要 |
<p>PROBLEM TO BE SOLVED: To absorb an impact load applied to a single acceleration sensor device so as to protect a semiconductor sensor element in its inside by a relatively simple structure. SOLUTION: This acceleration sensor device 1 includes a semiconductor sensor element 2 in its main surface for detecting acceleration of the vertical direction, a base plate 3 for supporting the sensor element 2, a package 11 for holding the base plate 3 and surrounding the base plate 3 and the sensor element 2, a frame 12 having a plurality of leg parts 12d protruded from the bottom surface of the package 11 and being fixed to the package 11, and a cap-like resin cover 13 having an overhead part 13a opposite the upper surface of the package 11 or the frame 12, the cover 13 being fixed to the package 11 from above, and the side wall part 13b of the cover 13 is extended at least to a position corresponding to the disposing portion of the sensor element 2.</p> |
