| 摘要 |
PROBLEM TO BE SOLVED: To obtain an optical waveguide element which is high in the propagation speed of surface acoustic waves and is high in high-speed scanning and with which high-speed modulation is possible. SOLUTION: A diamond thin-film 4 as an optical waveguide is formed via an optical buffer layer 3 consisting of SiO2 on an Si substrate 2. An interdigital transducer 11 is formed near the central part of the surface of the diamond thin film 4. A piezoelectric thin film 6 consisting of ZnO is formed on the diamond thin film 4. Grating couplers 12 for incidence and grating couplers 13 for exit are formed on both right and left sides of this piezoelectric thin film 6. |
